Thermal conduction properties of Mo/Si multilayers for extreme ultraviolet optics
نویسندگان
چکیده
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منابع مشابه
Experimental comparison of extreme-ultraviolet multilayers for solar physics.
We compare the reflectance and stability of multilayers comprising either Si/Mo, Si/Mo2C, Si/B4C, Si/C, or Si/SiC bilayers, designed for use as extreme-ultraviolet (EUV) reflective coatings. The films were deposited by using magnetron sputtering and characterized by both x-ray and EUV reflectometry. We find that the new Si/SiC multilayer offers the greatest spectral selectivity at the longer wa...
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